Publication Details Author Kartik Srinivasan Paul Barclay Oskar Painter Jianxin Chen Alfred Cho Publication Type Journal Article Year of Publication 2004 Volume 22 Number of Pages 875 ISSN Number 0734211X DOI 10.1116/1.1701848 URL http://scitation.aip.org/content/avs/journal/jvstb/22/3/10.1116/1.1701848 Journal Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures DOIGoogle Scholar Contributors Groups Srinivasan Research Group