Kang-mook
Lim
Lim, K.- mook, Gupta, S., Ropp, C., & Waks, E. (2011). Development of metal etch mask by single layer lift-off for silicon nitride photonic crystals. Microelectronic Engineering, 88(6), 994–998. http://doi.org/10.1016/j.mee.2010.12.113 (Original work published June 2011)